Measurement systems


Measurement systems

KYOCERA SOC Corporation provides various measurement systems for defect detection of semiconductor mask and wafer, inspection of liquid crystal panels, optical disk inspection and measurement, and environmental measurement, etc. Our high quality durable optics are applied to such optical systems to ensure reliability, performance and quality.

Fabrication records


  • Vacuum ultraviolet (VUV)
  • Deep ultraviolet (DUV)
  • Ultraviolet (UV)
  • Visual (VIS)
  • Near infrared (NIR)
  • Infrared (IR)
  • ※Please feel free to request other wavelengths.


  • High precision, high NA objective lenses
  • Light focusing
  • Observation
  • Illumination
  • Inspection
  • Projection
  • Relay
  • Spectroanalysis
  • Height detection
  • Autofocus
  • Anamorphic
  • Fiber output
  • Fiber light focusing
  • Fiber coupling
  • Homogenizer
  • Collimation
  • Opticas for focusing on linear
  • Laser scanning
  • Laser diode
  • Laser transmitting
  • Laser receiving
  • Differential interference
  • Laser interferometer
  • Zoom expander


Defect detection system for semiconductor mask and wafer, reticle defect detection machine, inspection system for liquid crystal panels, laser radar, spectroscopic analyzer

Clean room facility

It needs to pay keen attention to an environment of assembly and inspection to avoid particle inflow even if it is insensible. KYOCERA SOC Corporation uses clean rooms such as class 100,000, 10,000 and 100 depending on its operational needs and conducts every assembly or inspection process of optical equipments or optical systems.

Clean room facility

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