Objective lenses for mask / wafer inspection
Wide field of view・Long working distance and Aberration-free
The MI series of objective lenses for mask / wafer inspection have co-functioning with a wide field of view, long working distance and aberration-free, and are suitable for semiconductor photomask / wafer inspection.
Customized support for interface section and various relay lenses is available.
- From its refractive optical system, it has no shielding , but long working distance.
- It is achromatic within the spectrum of the laser, resulting in good imaging properties.
- The design performance is numerically guaranteed by measuring wavefront aberration with an interferometer.
- Suitable for semiconductor mask / wafer observation applications.
- Semiconductor wafer inspection equipment
- Semiconductor mask inspection equipment
（full wodth at half mximum）
|Field of view