High NA UV Objective lens (Adhesive - Free)

高NA紫外対物レンズ(接着剤不使用品有)

High NA Objective lens (for YAG laser)

High NA makes the focused spot diameter small, and the high resistance coating makes it possible to use under a high power laser.
Also adhesive-free products are available. This adhesive-free products reduce and minimize the outgas to the utmost limit.

Key features

Features
  • For 405nm, 355nm and 266nm(each exclusive)
  • Small focus spot diameter from high NA
  • High resitance coating allows high-power laser use
  • Adhesive-free products reduce outgas to the utmost limit
Applications
  • High resolution imaging such as semiconductor mask/wafer observation
  • Laser microfabrication by submicron level
CA266-4085 and CA355-4085 are adhesive-free products.
Ultraviolet Objective Lens(NA x FOV)

Specification examples

Model No. CA266-4085
ST266-4085
CA355-4085
ST355-4085
CA405-4085
ST405-4085
Wavelength 266nm 355nm 405nm
Numerical aperture(NA) 0.85
Focal length 4mm
Transmittance ≧85%
Field of view Φ0.45mm
Theorical resolution ※1 0.19um 0.25um 0.29um
Focus spot size ※2 Φ0.20um Φ0.27um Φ0.30um
Working distance 1mm
Parfocal length 60mm
Outer diameter CA:Φ45mm
ST:Φ39mm
Mounting threads M25×0.75

※1. Airy disk radius=0.61λ/NA
※2. Focus spot size=4λM2f/πD. Calculated with M2=1,f/D=1/2NA.

Dimensions

CA266-4085,CA355-4085
CA266-4085,CA355-4085
ST266-4085,ST355-4085
ST266-4085,ST355-4085

Catalog Download

High NA UV Objective lens (pdf, 317KB)
High NA UV Objective lens (Adhesive - Free) (pdf, 357KB)