Objective lenses

Objective lenses

 Objective lens is the lens located closest to the object in optical instruments, and the objective lenses of telescopes and microscopes are typical. The objective lens is the most important optical unit that determines the basic performance and functions of an optical microscope.
 We are good at designing and manufacturing the highest quality objective lenses in the ultraviolet wavelength range.

Features
 Refraction type, reflection type, reflection refraction type are available
 High NA (~ 0.95)
 Wide field of view (~ φ6mm)
 Performance guarantee due to wave surface aberration

Use
 Semiconductor photomask inspection
 Semiconductor wafer inspection
 Mask lighter
 Laser processing

High NA UV Objective lens PDF (262KB)
High NA UV Objective lens(No adhesive used) PDF (267KB)
Objective lenses for mask and wafer inspection PDF (526KB)
Temperature Change Resistant Titanium Objective Lens PDF (303KB)