Objective lenses

Objective lenses

Objective lenses

 Objective lens is the lens located closest to the object in optical instruments, and the objective lenses of telescopes and microscopes are typical. The objective lens is the most important optical unit that determines the basic performance and functions of an optical microscope.
 We are good at designing and manufacturing the highest quality objective lenses in the ultraviolet wavelength range.

Features
 Refraction type, reflection type, reflection refraction type are available
 High NA (~ 0.95)
 Wide field of view (~ φ6mm)
 Performance guarantee due to wave surface aberration

Use
 Semiconductor photomask inspection
 Semiconductor wafer inspection
 Mask lighter
 Laser processing

High NA UV Objective lens(No adhesive used) (pdf, 434KB)
Objective lenses for mask and wafer inspection (pdf, 526KB)
Temperature Change Resistant Titanium Objective Lens (pdf, 303KB)

Applications

Laser processing machine, solar cell manufacturing and inspection system, semiconductor manufacturing and inspection system, LCD manufacturing and inspection system, etc.

Specification examples

High NA UV Objective lens(No adhesive used) (pdf, 434KB)

Molel No Wavelength Focal length NA Field of view WD
CA266-4085 266nm 4mm 0.85 φ0.45mm 1mm
CA355-4085 355nm

Objective lenses for mask and wafer inspection (pdf, 526KB)

Molel No Wavelength Focal length NA Field of view WD
MI193-5085 193nm 5mm 0.85 φ0.45mm 8mm
MI213-5085 213nm
MI248-5085 248nm
MI266-5085 266nm
MI355-5085 355nm

Objective lenses for excimer laser processing

Model No. Wavelength Focal length NA Processing area WD Window
KVH20-8 248～266nm/546nm 20mm 0.2 0.5mm 10.2mm Replaceable
KVH40-9.6 248～266nm/546nm 40mm 0.12 2mm 24mm Replaceable
KV100-25 248nm 100mm 0.125 2mm 70mm N/A
KV200-25 248nm 200mm 0.05 4mm 192mm N/A

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